I can't give you an opinion on the other master degrees that you've mentioned since I don't really know anything about it.
But I can offer some hindsight on a masters in CS: Interdisciplinary is far better.
The problem with a masters in comp sci is this: It's really more of the same; it's not good enough for research-level work; and on its own it doesn't really add much to your own marketability once you have 5+ years of experience. At most, I'd say it gives you a small edge and maybe some personal satisfaction because.
Now, if there's a particular line of study that you're deeply interested in then by all means; just realize you have to slog through "more of the same" before you get to study what you really want. And if you're truly that passionate, then you may want to consider a PhD.
In my case, I really regret not going for a masters in mathematics since I find most of the topics very interesting